The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Apabila mesin mikro berfungsi di dalam ruang sempit di dalam tiub dan peralatan seperti kilang mikro, peranti mikro yang mempunyai fungsi visual amat diperlukan. Untuk memantau bentuk kecil proses mikrofabrikasi dan pemasangan mikro yang mustahil untuk diperhatikan, sensor gentian optik dan penggerak untuk peranti pengecaman alam sekitar telah dibangunkan. Peranti direka untuk membolehkan pemerhatian stereoskopik dan mikroskopik dan untuk mengukur dimensi bahagian mikro. Untuk mencapai matlamat ini dan untuk merealisasikan struktur dan fungsi kecil, kami membangunkan peranti pengecaman alam sekitar untuk proses mikrofabrikasi dengan fungsi pemerhatian medan jauh dan dekat, penderiaan sentuhan dan artikulasi hujung, untuk proses pemasangan mikro dengan fungsi pemerhatian stereoskopik dan artikulasi hujung. Keputusan menunjukkan bahawa pengiktirafan alam sekitar yang mudah dan selamat adalah mungkin dalam ruang sempit sebuah kilang mikro.
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Salinan
Osamu TOHYAMA, Shigeo MAEDA, Kazuhiro ABE, Manabu MURAYAMA, "Fiber-Optic Sensors and Actuators for Environmental Recognition Devices" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 3, pp. 475-480, March 2000, doi: .
Abstract: When a micromachine works inside a narrow space inside tubes and equipment such as a microfactory, a microdevice that has a visual function is indispensable. To monitor the minute shapes of microfabrication and microassembly process that are impossible to observe, fiber-optic sensors and actuators for environmental recognition devices have been developed. The devices are designed to allow stereoscopic and microscopic observation and to measure the dimensions of microparts. To achieve these goals and to realize minute structures and functions, we developed environmental recognition devices for microfabrication process with functions of far and near field observation, tactile sensing and tip articulation, for microassembly process with functions of stereoscopic observation and tip articulation. The results show that easy and safe environmental recognition is possible in the narrow spaces of a microfactory.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_3_475/_p
Salinan
@ARTICLE{e83-c_3_475,
author={Osamu TOHYAMA, Shigeo MAEDA, Kazuhiro ABE, Manabu MURAYAMA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fiber-Optic Sensors and Actuators for Environmental Recognition Devices},
year={2000},
volume={E83-C},
number={3},
pages={475-480},
abstract={When a micromachine works inside a narrow space inside tubes and equipment such as a microfactory, a microdevice that has a visual function is indispensable. To monitor the minute shapes of microfabrication and microassembly process that are impossible to observe, fiber-optic sensors and actuators for environmental recognition devices have been developed. The devices are designed to allow stereoscopic and microscopic observation and to measure the dimensions of microparts. To achieve these goals and to realize minute structures and functions, we developed environmental recognition devices for microfabrication process with functions of far and near field observation, tactile sensing and tip articulation, for microassembly process with functions of stereoscopic observation and tip articulation. The results show that easy and safe environmental recognition is possible in the narrow spaces of a microfactory.},
keywords={},
doi={},
ISSN={},
month={March},}
Salinan
TY - JOUR
TI - Fiber-Optic Sensors and Actuators for Environmental Recognition Devices
T2 - IEICE TRANSACTIONS on Electronics
SP - 475
EP - 480
AU - Osamu TOHYAMA
AU - Shigeo MAEDA
AU - Kazuhiro ABE
AU - Manabu MURAYAMA
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 3
JA - IEICE TRANSACTIONS on Electronics
Y1 - March 2000
AB - When a micromachine works inside a narrow space inside tubes and equipment such as a microfactory, a microdevice that has a visual function is indispensable. To monitor the minute shapes of microfabrication and microassembly process that are impossible to observe, fiber-optic sensors and actuators for environmental recognition devices have been developed. The devices are designed to allow stereoscopic and microscopic observation and to measure the dimensions of microparts. To achieve these goals and to realize minute structures and functions, we developed environmental recognition devices for microfabrication process with functions of far and near field observation, tactile sensing and tip articulation, for microassembly process with functions of stereoscopic observation and tip articulation. The results show that easy and safe environmental recognition is possible in the narrow spaces of a microfactory.
ER -