The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Kami mencadangkan struktur tiga dimensi pada substrat satah yang menggunakan teknologi pemesinan mikro. Struktur terampai kehilangan rendah yang menggabungkan membran BCB yang menggunakan teknologi goresan parit dalam telah dicadangkan baru-baru ini. Struktur talian terampai mikromesin menggunakan filem membran BCB membolehkan kami merealisasikan resonator satah kehilangan rendah, yang mencapai faktor kualiti tidak dimuatkan (faktor Q) lebih daripada 280 pada 60 GHz. Kami mereka bentuk penapis dan antena kehilangan rendah yang dibina ke dalam silikon dalam jalur 60 GHz. Penapis kehilangan rendah menyedari kehilangan sisipan sebanyak 1.0 dB pada 60 GHz dan antena tampalan memperoleh lebar jalur 3%. Di samping itu, kami menunjukkan IC bahagian hadapan penerima 60 GHz yang menggabungkan penapis satah dan antena, dan memperoleh hasil yang baik. Teknik ini membolehkan kami menyepadukan pelbagai fungsi ke dalam pakej padat walaupun dalam jalur gelombang milimeter.
Kazuaki TAKAHASHI
Ushio SANGAWA
Suguru FUJITA
Michiaki MATSUO
Takeharu URABE
Hiroshi OGURA
Hiroyuki YABUKI
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Salinan
Kazuaki TAKAHASHI, Ushio SANGAWA, Suguru FUJITA, Michiaki MATSUO, Takeharu URABE, Hiroshi OGURA, Hiroyuki YABUKI, "A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure" in IEICE TRANSACTIONS on Electronics,
vol. E84-C, no. 10, pp. 1506-1514, October 2001, doi: .
Abstract: We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e84-c_10_1506/_p
Salinan
@ARTICLE{e84-c_10_1506,
author={Kazuaki TAKAHASHI, Ushio SANGAWA, Suguru FUJITA, Michiaki MATSUO, Takeharu URABE, Hiroshi OGURA, Hiroyuki YABUKI, },
journal={IEICE TRANSACTIONS on Electronics},
title={A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure},
year={2001},
volume={E84-C},
number={10},
pages={1506-1514},
abstract={We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.},
keywords={},
doi={},
ISSN={},
month={October},}
Salinan
TY - JOUR
TI - A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure
T2 - IEICE TRANSACTIONS on Electronics
SP - 1506
EP - 1514
AU - Kazuaki TAKAHASHI
AU - Ushio SANGAWA
AU - Suguru FUJITA
AU - Michiaki MATSUO
AU - Takeharu URABE
AU - Hiroshi OGURA
AU - Hiroyuki YABUKI
PY - 2001
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E84-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2001
AB - We propose a three-dimensional structure on a planar substrate employing micromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables us to realize a low loss planar resonator, which achieved an unloaded quality factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A low-loss filter realizes an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% bandwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorporating the planar filter and the antenna, and obtain good results. These techniques enable us to integrate various functions into a compact package even in millimeter-wave bands.
ER -